The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Dec. 10, 2007
Laurentius Cornelius DE Winter, Vessem, NL;
Jozef Maria Finders, Veldhoven, NL;
Maria Johanna Agnes Rubingh, Eindhoven, NL;
Laurentius Cornelius De Winter, Vessem, NL;
Jozef Maria Finders, Veldhoven, NL;
Maria Johanna Agnes Rubingh, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of optimizing adjustable settings of adjustable elements of a projection system in a lithographic apparatus is disclosed that includes determining an object spectrum for a pattern and an illumination arrangement, determining a symmetry of the object spectrum, constructing a merit function for a wavefront in a pupil plane of the projection system with the settings of the adjustable elements as variables with reference to the symmetry, and optimizing the merit function.