The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
May. 31, 2005
Gokhan Percin, San Jose, CA (US);
Ram S. Ramanujam, San Jose, CA (US);
Franz X. Zach, Los Gatos, CA (US);
Abdurrahman Sezginer, Los Gatos, CA (US);
Chi-song Horng, Palo Alto, CA (US);
Roy Prasad, Los Gatos, CA (US);
Gokhan Percin, San Jose, CA (US);
Ram S. Ramanujam, San Jose, CA (US);
Franz X. Zach, Los Gatos, CA (US);
Abdurrahman Sezginer, Los Gatos, CA (US);
Chi-Song Horng, Palo Alto, CA (US);
Roy Prasad, Los Gatos, CA (US);
Invarium, Inc., San Jose, CA (US);
Abstract
A method for generating an OPC model is provided which takes into consideration across-wafer variations which occur during the process of manufacturing semiconductor chips. More particularly, a method for generating an OPC model is provided which takes into consideration across-wafer variations which occur during the process of manufacturing semiconductor chips based on the parameters of test patterns measured at the 'wafer sweet spots' so as to arrive at an accurate model.