The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Mar. 04, 2006
Masatoshi Yasutake, Chiba, JP;
Takuya Nakaue, Chiba, JP;
Kazutoshi Watanabe, Chiba, JP;
Osamu Takaoka, Chiba, JP;
Atsushi Uemoto, Chiba, JP;
Naoya Watanabe, Chiba, JP;
Yoshiteru Shikakura, Chiba, JP;
Masatoshi Yasutake, Chiba, JP;
Takuya Nakaue, Chiba, JP;
Kazutoshi Watanabe, Chiba, JP;
Osamu Takaoka, Chiba, JP;
Atsushi Uemoto, Chiba, JP;
Naoya Watanabe, Chiba, JP;
Yoshiteru Shikakura, Chiba, JP;
SII Nanotechnology Inc., , JP;
Abstract
The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.