The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2008
Filed:
Feb. 22, 2006
Ron Naftali, Shoham, IL;
Yoram Uziel, Post Misgav, IL;
Ran Vered, Nechalim, IL;
Eitan Pinhasi, Beny-Brak, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Ron Naftali, Shoham, IL;
Yoram Uziel, Post Misgav, IL;
Ran Vered, Nechalim, IL;
Eitan Pinhasi, Beny-Brak, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Applied Materials, Israel,Ltd., Rehovot, IL;
Abstract
A substrate inspection system includes two or more inspection modules supported on a plate. A chamber is supported beneath the plate by a translation system, which is configured to provide horizontal displacement of the chamber under the plate to permit loading and unloading of a substrate to/from the chamber. Thus, when the chamber is in a loading/unloading position it is at least partially uncovered from the plate. The translation system may be further configured to provide vertical displacement of the chamber with respect to the plate so as to position an upper surface of a wall of the chamber in close proximity to a lower surface of the plate when the chamber is in an inspection position. In such a position, the upper surface of the wall of the chamber and the lower surface of the plate may be separated by an air gap.