The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2008

Filed:

Jul. 15, 2003
Applicants:

Benjamin A. Haskell, Goleta, CA (US);

Paul T. Fini, Santa Barbara, CA (US);

Shigemasa Matsuda, Tokyo, JP;

Michael D. Craven, Goleta, CA (US);

Steven P. Denbaars, Goleta, CA (US);

James S. Speck, Goleta, CA (US);

Shuji Nakamura, Santa Barbara, CA (US);

Inventors:

Benjamin A. Haskell, Goleta, CA (US);

Paul T. Fini, Santa Barbara, CA (US);

Shigemasa Matsuda, Tokyo, JP;

Michael D. Craven, Goleta, CA (US);

Steven P. DenBaars, Goleta, CA (US);

James S. Speck, Goleta, CA (US);

Shuji Nakamura, Santa Barbara, CA (US);

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/205 (2006.01);
U.S. Cl.
CPC ...
Abstract

Highly planar non-polar GaN films are grown by hydride vapor phase epitaxy (HVPE). The resulting films are suitable for subsequent device regrowth by a variety of growth techniques.


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