The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2008
Filed:
Jun. 01, 2005
Anshuman Cherala, Austin, TX (US);
Byung-jin Choi, Austin, TX (US);
Pawan K. Nimmakayala, Austin, TX (US);
Mario J. Meissl, Austin, TX (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Anshuman Cherala, Austin, TX (US);
Byung-Jin Choi, Austin, TX (US);
Pawan K. Nimmakayala, Austin, TX (US);
Mario J. Meissl, Austin, TX (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Abstract
The present invention is directed toward a method to vary dimensions of a substrate supported by a chuck. The method includes applying compressive forces to the substrate with the actuator assembly while facilitating movement of the actuator assembly with respect to the substrate to minimize reactive forces generated in response to the compressive forces being sensed by the chuck.