The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
Jan. 25, 2007
Ichiro Ishimaru, Mure, JP;
Minori Noguchi, Mitsukaidou, JP;
Ichiro Moriyama, Hamura, JP;
Yoshikazu Tanabe, Irima, JP;
Yasuo Yatsugake, Kamisato, JP;
Yukio Kenbou, Tokyo, JP;
Kenji Watanabe, Oume, JP;
Hirofumi Tsuchiyama, Hitachinaka, JP;
Ichiro Ishimaru, Mure, JP;
Minori Noguchi, Mitsukaidou, JP;
Ichiro Moriyama, Hamura, JP;
Yoshikazu Tanabe, Irima, JP;
Yasuo Yatsugake, Kamisato, JP;
Yukio Kenbou, Tokyo, JP;
Kenji Watanabe, Oume, JP;
Hirofumi Tsuchiyama, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An apparatus for detecting defects, including: a first illumination optical unit which illuminates from a normal direction or in the vicinity of the normal direction; a second illumination optical unit which illuminates from a first elevation angle; a first detection optical unit which detects light reflected by the illumination of the first illumination optical unit or the second illumination optical unit with plural detectors; a second detection optical unit which detects light reflected by the illumination of the first illumination optical unit or the second illumination optical unit with plural detectors; wherein the plural detectors of the first detection optical unit and the plural detectors of the second detection optical unit are photomultipliers, and the signal processor processes the signals outputted from the photomultipliers and are adjusted to balance in sensitivities.