The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2008
Filed:
Jun. 28, 2005
Rodney D. Simmons, San Diego, CA (US);
John W. Viatella, San Diego, CA (US);
Jerzy R. Hoffman, Escondido, CA (US);
R. Kyle Webb, Escondido, CA (US);
Alexander N. Bykanov, San Diego, CA (US);
Oleh Khodykin, San Diego, CA (US);
Rodney D. Simmons, San Diego, CA (US);
John W. Viatella, San Diego, CA (US);
Jerzy R. Hoffman, Escondido, CA (US);
R. Kyle Webb, Escondido, CA (US);
Alexander N. Bykanov, San Diego, CA (US);
Oleh Khodykin, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A laser produced plasma ('LPP') extreme ultraviolet ('EUV') light source and method of operating same is disclosed which may comprise an EUV plasma production chamber having a chamber wall; a drive laser entrance window in the chamber wall; a drive laser entrance enclosure intermediate the entrance window and a plasma initiation site within the chamber and comprising an entrance enclosure distal end opening; at least one aperture plate intermediate the distal opening and the entrance window comprising at least one drive laser passage aperture. The at least one aperture plate may comprise at least two aperture plates comprising a first aperture plate and a second aperture plate defining an aperture plate interim space. The at least one drive laser aperture passage may comprise at least two drive laser aperture passages. The laser passage aperture may define an opening large enough to let the drive laser beam pass without attenuation and small enough to substantially reduce debris passing through the laser passage aperture in the direction of the entrance window.