The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2008
Filed:
Feb. 09, 2007
Takayuki Katano, Kai, JP;
Hidefumi Matsui, Nirasaki, JP;
Junichi Kitano, Koshi, JP;
Yo Suzuki, Miyagi-gun, JP;
Masami Yamashita, Minato-ku, JP;
Toru Aoyama, Minamiarupsu, JP;
Hiroyuki Iwaki, Minato-ku, JP;
Satoru Shimura, Nirasaki, JP;
Takayuki Katano, Kai, JP;
Hidefumi Matsui, Nirasaki, JP;
Junichi Kitano, Koshi, JP;
Yo Suzuki, Miyagi-gun, JP;
Masami Yamashita, Minato-ku, JP;
Toru Aoyama, Minamiarupsu, JP;
Hiroyuki Iwaki, Minato-ku, JP;
Satoru Shimura, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
On top of respective areas divided by partition plates, that is, a cassette station, a processing station, and an interface section in a coating and developing processing system, gas supply sections for supplying an inert gas into the respective areas are provided. Exhaust pipes for exhausting atmospheres in the respective areas are provided at the bottom of the respective areas. The atmospheres in the respective areas are maintained in a clean condition by supplying the inert gas not containing impurities such as oxygen and fine particles from the respective gas supply sections into the respective areas and exhausting the atmospheres in the respective areas from the exhaust pipes.