The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2008
Filed:
Jul. 19, 2005
Applicants:
Stanislav V. Aleshin, Moscow, RU;
Marina M. Medvedeva, Moscow, RU;
Sergei B. Rodin, Moscow, RU;
Eugeni E. Egorov, Moscow, RU;
Inventors:
Stanislav V. Aleshin, Moscow, RU;
Marina M. Medvedeva, Moscow, RU;
Sergei B. Rodin, Moscow, RU;
Eugeni E. Egorov, Moscow, RU;
Assignee:
LSI Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention is directed to a method and apparatus for optimizing fragmentation of integrated circuit boundaries for optical proximity correction (OPC) purposes. The present invention may balance the number of vertices and the 'flexibility' of the boundary and may recover fragmentation according to the process intensity profile along the ideal edge position to obtain the best decision for OPC.