The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
Feb. 08, 2001
Applicants:
Marcus J. H. Willems Van Dijk, Uden, NL;
Engelbertus A. F. Van DE Pasch, Oirschot, NL;
Thomas J. M. Castenmiller, Eindhoven, NL;
Andreas B. G. Ariens, Utrecht, NL;
Inventors:
Marcus J. H. Willems van Dijk, Uden, NL;
Engelbertus A. F. van de Pasch, Oirschot, NL;
Thomas J. M. Castenmiller, Eindhoven, NL;
Andreas B. G. Ariens, Utrecht, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for placement of a object such as a substrate or a mask on a table, said method including: