The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
Oct. 24, 2005
Courosh Mehanian, Mountain View, CA (US);
Steven W. Meeks, Fremont, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Courosh Mehanian, Mountain View, CA (US);
Steven W. Meeks, Fremont, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
In one embodiment, a surface scanning system comprises a radiation directing assembly that scans a surface using a Cartesian scanning pattern; and a radiation collecting assembly that collects radiation reflected from the surface. A scattered radiation collection system is included that measures the scattered light from the surface.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile