Electron beam apparatus and a device manufacturing method using the same apparatus

Abstract

Disclosed is an electron beam apparatus, in which a plurality of electron beams is formed from electrons emitted from an electron gunand used to irradiate a sample surface via an objective lens, said apparatus comprising: a beam separatorfor separating a secondary electron beams emanating from respective scanned regions on the sample from the primary electron beams; a magnifying electron lensfor extending a beam space between adjacent beams in the separated plurality of secondary electron beams; a fiber optical platefor converting the magnified plurality of secondary electron beams to optical signals by a scintillator and for transmitting the signals; a photoelectric conversion devicefor converting the optical signal to an electric signal; an optical zoom lensfor focusing the optical signal from the scintillator into an image on the photoelectric conversion device; and a rotation mechanismfor rotating the photoelectric conversion devicearound the optical axis.