The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Jan. 17, 2000
Norio Maeda, Yamatokouriyama, JP;
Koji Sumi, Yamatokouriyama, JP;
Hiroshi Aihara, Sakai, JP;
Masao Oono, Sakai, JP;
Takao Matsumoto, Saki, JP;
Naoaki Izutani, Sakai, JP;
Norio Maeda, Yamatokouriyama, JP;
Koji Sumi, Yamatokouriyama, JP;
Hiroshi Aihara, Sakai, JP;
Masao Oono, Sakai, JP;
Takao Matsumoto, Saki, JP;
Naoaki Izutani, Sakai, JP;
Daikin Industries, Ltd., Osaka, JP;
Abstract
A device for drying substrate comprising a processing vessel housing a specified number of substrates such as semiconductor wafers installed erectedly in parallel to one another, a first substrate supporting member supporting substrates within the processing vessel, the processing fluid supplying section supplying to the processing vessel, the processing fluid for performing processing such as cleaning processing on the substrates, a processing fluid exhausting section exhausting processing fluid from the processing vessel, and a drying fluid supplying section supplying, to the processing vessel, the liquid drops of drying fluid for performing drying processing on the substrates.