The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2008
Filed:
Apr. 04, 2006
Hiromi Inada, Hitachinaka, JP;
Hiroyuki Tanaka, Hitachinaka, JP;
Shun-ichi Watanabe, Hitachinaka, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Satoshi Yamaguchi, Hitachinaka, JP;
Hiromi Inada, Hitachinaka, JP;
Hiroyuki Tanaka, Hitachinaka, JP;
Shun-ichi Watanabe, Hitachinaka, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Satoshi Yamaguchi, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodica structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.