The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
Sep. 27, 2005
Vadim Yevgenyevich Banine, Helmond, NL;
Lambertus Adrianus Wildenberg, Geldrop, NL;
Vladimir Mihailovitch Krivtsun, Moscow, RU;
Alexander Matthijs Struycken, Eindhoven, NL;
Johannes Bernardus Ridder, Veldhoven, NL;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Josephus Jacobus Smits, Geldrop, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Lambertus Adrianus Wildenberg, Geldrop, NL;
Vladimir Mihailovitch Krivtsun, Moscow, RU;
Alexander Matthijs Struycken, Eindhoven, NL;
Johannes Bernardus Ridder, Veldhoven, NL;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Josephus Jacobus Smits, Geldrop, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A collector assembly with a radiation collector, a cover plate and a support member connecting the radiation collector to the cover plate are provided. The cover plate is designed to cover an opening in a collector chamber. The collector chamber opening may be large enough to pass the radiation collector and the support member. The removed radiation collector can be cleaned with different cleaning procedures, which may be performed in a cleaning device. Such cleaning device may for example consist of the following: a circumferential hull designed to provide an enclosure volume for circumferentially enclosing at least the radiation collector; an inlet configured to provide at least one of a cleaning gas and a cleaning liquid to the enclosure volume to clean at least said radiation collector; and an outlet configured to remove said at least one of said cleaning gas and said cleaning liquid from the enclosure volume.