The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Dec. 07, 2004
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Arno Jano Bleeker, Westerhoven, NL;
Wilhelmus Josephus Box, Eksel, BE;
Martinus Hendricus Hendricus Hoeks, Breugel, NL;
Henricus Gerardus Tegenbosch, Eindhoven, NL;
Kars Zeger Troost, Waalre, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Arno Jano Bleeker, Westerhoven, NL;
Wilhelmus Josephus Box, Eksel, BE;
Martinus Hendricus Hendricus Hoeks, Breugel, NL;
Henricus Gerardus Tegenbosch, Eindhoven, NL;
Kars Zeger Troost, Waalre, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A system and method are used to allow for compensation of a thermal output of an array of individually controllable elements. This can be done by inputting control signals to the array when it is not being used to pattern a projection beam in order to maintain the temperature of the array. A heating element can be provided to maintain the temperature of the array. A thermal reservoir can be provided to maintain the temperature of the array or a cooling element can be provided to reduce the temperature of the array during use.