The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Dec. 21, 2004
Gian F. Lorusso, Leefdaal, BE;
Christopher F. Bevis, Los Gatos, CA (US);
Luca Grella, Gilroy, CA (US);
David L. Adler, San Jose, CA (US);
Ian Smith, Los Gatos, CA (US);
Gian F. Lorusso, Leefdaal, BE;
Christopher F. Bevis, Los Gatos, CA (US);
Luca Grella, Gilroy, CA (US);
David L. Adler, San Jose, CA (US);
Ian Smith, Los Gatos, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
Parameters of a metrology tool may be determined by measuring a dimension of a feature on a calibration standard with the tool and using the measured dimension and a known traceable value of the dimension to determine a value for the parameter. If the dimension of the feature on the standard has a known traceable value, different standards may be used to calibrate different tools.