The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2008
Filed:
Dec. 02, 2005
Kazuhiro Honda, Tokyo, JP;
Natsuko Nakamura, Tokyo, JP;
Shinobu Uno, Tokyo, JP;
Joachim Zach, Heidelberg, DE;
Kazuhiro Honda, Tokyo, JP;
Natsuko Nakamura, Tokyo, JP;
Shinobu Uno, Tokyo, JP;
Joachim Zach, Heidelberg, DE;
Jeol Ltd., Tokyo, JP;
Abstract
There is disclosed a method and apparatus for automatically correcting a charged-particle beam with an aberration corrector without the operator performing manual operations. The apparatus has an extraction portion for extracting the profile of the beam from images of a surface of a sample, a calculation unit for calculating the amount of axial deviation of the apparatus from the position of the extracted profile of the beam, and a feedback unit for automatically applying feedback to the aberration corrector or to the objective lens according to the calculated amount of axial deviation.