The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2008
Filed:
Mar. 21, 2007
Kenji Watanabe, Kanagawa-ken, JP;
Tohru Satake, Kanagawa-ken, JP;
Nobuharu Noji, Kanagawa-ken, JP;
Takeshi Murakami, Tokyo, JP;
Tsutomu Karimata, Kanagawa-ken, JP;
Yuichiro Yamazaki, Tokyo, JP;
Ichirota Nagahama, Ibaraki-ken, JP;
Atsushi Onishi, Kanagawa-ken, JP;
Kenji Watanabe, Kanagawa-ken, JP;
Tohru Satake, Kanagawa-ken, JP;
Nobuharu Noji, Kanagawa-ken, JP;
Takeshi Murakami, Tokyo, JP;
Tsutomu Karimata, Kanagawa-ken, JP;
Yuichiro Yamazaki, Tokyo, JP;
Ichirota Nagahama, Ibaraki-ken, JP;
Atsushi Onishi, Kanagawa-ken, JP;
Ebara Corporation, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
Provided is a sample observing method allowing for a detailed observation of a sample by using one and the same electron beam apparatus. The method uses an electron beam apparatuscomprising a primary optical systemserving for irradiating the electron beam onto the sample surface and a secondary optical systemserving for detecting secondary electrons emanating from said sample surface to form an image of the sample surface. The inspection is carried out on the sample surface, S, by irradiating the electron beam to the sample surface, and after the extraction of a defective region in the sample based on the inspection, the extracted defective region is once again applied with the irradiation of the electron beam so as to provide a magnification or a detailed observation of the defective region.