The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2008
Filed:
May. 25, 2006
Yi-nan Su, Tao-Yuan, TW;
Yung-chang Lin, Tai-Chung Hsien, TW;
Jun-chi Huang, Tai-Chung Hsien, TW;
United Microelectronics Corp., Hsin-Chu, TW;
Abstract
A method for fabricating a trench capacitor is disclosed. A substrate having a first pad layer is provided. STI structure is embedded into the first pad layer and the substrate. A second pad layer is deposited over the first pad layer and the STI structure. Two adjacent trenches are etched into the first, second pad layers, and the semiconductor substrate. The second pad layer and a portion of the STI structure between the two trenches are etched to form a ridge. A liner is formed on interior surface of the trenches. A first polysilicon layer is formed on the liner. A capacitor dielectric layer is formed on the first polysilicon layer. The two adjacent trenches are filled with a second polysilicon layer. The second polysilicon layer is then etched until the capacitor dielectric layer is exposed. The fabrication process is easy to integrate to SoC chip.