The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2008
Filed:
Aug. 27, 2004
Tooru Kurenuma, Tsuchiura, JP;
Hiroaki Yanagimoto, Tsuchiura, JP;
Hiroshi Kuroda, Tsuchiura, JP;
Yasushi Minomoto, Tsuchiura, JP;
Shigeru Miwa, Tsuchiura, JP;
Ken Murayama, Tsuchiura, JP;
Yukio Kenbou, Tsuchiura, JP;
Yuuichi Kunitomo, Tsuchiura, JP;
Takenori Hiroki, Tsuchiura, JP;
Yoshiyuki Nagano, Tsuchiura, JP;
Takafumi Morimoto, Tsuchiura, JP;
Tooru Kurenuma, Tsuchiura, JP;
Hiroaki Yanagimoto, Tsuchiura, JP;
Hiroshi Kuroda, Tsuchiura, JP;
Yasushi Minomoto, Tsuchiura, JP;
Shigeru Miwa, Tsuchiura, JP;
Ken Murayama, Tsuchiura, JP;
Yukio Kenbou, Tsuchiura, JP;
Yuuichi Kunitomo, Tsuchiura, JP;
Takenori Hiroki, Tsuchiura, JP;
Yoshiyuki Nagano, Tsuchiura, JP;
Takafumi Morimoto, Tsuchiura, JP;
Hitachi Kenki Fine Tech Co., Ltd., Tokyo, JP;
Abstract
The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantileverhaving a probe tipfacing a sample. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms, andare used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.