The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Oct. 04, 2005
Steven R. Codding, Underhill Center, VT (US);
Timothy C. Krywanczyk, Essex Junction, VT (US);
Edmund J. Sprogis, Underhill, VT (US);
Jocelyn Sylvestre, Granby, CA;
Matthew R. Whalen, Chelsea, VT (US);
Steven R. Codding, Underhill Center, VT (US);
Timothy C. Krywanczyk, Essex Junction, VT (US);
Edmund J. Sprogis, Underhill, VT (US);
Jocelyn Sylvestre, Granby, CA;
Matthew R. Whalen, Chelsea, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method for the removal of residual UV radiation-sensitive adhesive from the surfaces of semiconductor wafers, remaining thereon from protective UV radiation-sensitive tapes which were stripped from the semiconductor wafers. Moreover, provided is an arrangement for implementing the removal of residual sensitive adhesive, which remain from tapes employed as protective layers on semiconductor wafers, particularly wafers having surfaces including C4 connections.