The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2008
Filed:
Sep. 19, 2005
Aaron Scott Lukas, Washington, DC (US);
Mark Leonard O'neill, Allentown, PA (US);
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
Raymond Nicholas Vrtis, Orefield, PA (US);
Jean Louise Vincent, Bethlehem, PA (US);
Aaron Scott Lukas, Washington, DC (US);
Mark Leonard O'Neill, Allentown, PA (US);
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
Raymond Nicholas Vrtis, Orefield, PA (US);
Jean Louise Vincent, Bethlehem, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A porous organosilicate glass (OSG) film: SiOCHF, where v+w+x+y+z=100%, v is 10 to 35 atomic %, w is 10 to 65 atomic %, x is 5 to 30 atomic %, y is 10 to 50 atomic % and z is 0 to 15 atomic %, has a silicate network with carbon bonds as methyl groups (Si—CH) and contains pores with diameter less than 3 nm equivalent spherical diameter and dielectric constant less than 2.7. A preliminary film is deposited by a chemical vapor deposition method from organosilane and/or organosiloxane precursors, and independent pore-forming precursors. Porogen precursors form pores within the preliminary film and are subsequently removed to provide the porous film. Compositions, film forming kits, include organosilane and/or organosiloxane compounds containing at least one Si—H bond and porogen precursors of hydrocarbons containing alcohol, ether, carbonyl, carboxylic acid, ester, nitro, primary amine, secondary amine, and/or tertiary amine functionality or combinations.