The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2008
Filed:
Sep. 06, 2006
Atsushi Takane, Mito, JP;
Haruo Yoda, Nishitama-gun, JP;
Hideo Todokoro, Nishitama-gun, JP;
Fumio Mizuno, Tokorozawa, JP;
Shoji Yoshida, Hitachi, JP;
Mitsuji Ikeda, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Makoto Ezumi, Mito, JP;
Atsushi Takane, Mito, JP;
Haruo Yoda, Nishitama-gun, JP;
Hideo Todokoro, Nishitama-gun, JP;
Fumio Mizuno, Tokorozawa, JP;
Shoji Yoshida, Hitachi, JP;
Mitsuji Ikeda, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Makoto Ezumi, Mito, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.