The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2008
Filed:
Sep. 25, 2006
Hae Seok Ji, Disan, KR;
Ook Jae Cho, Ulsan, KR;
Jae Gug Ryu, Disan, KR;
Jong Yeol Yang, Disan, KR;
Young Hoon Ahn, Ulsan, KR;
Bong Suk Kim, Disan, KR;
Dong Hyun Kim, Disan, KR;
Hae Seok Ji, Disan, KR;
Ook Jae Cho, Ulsan, KR;
Jae Gug Ryu, Disan, KR;
Jong Yeol Yang, Disan, KR;
Young Hoon Ahn, Ulsan, KR;
Bong Suk Kim, Disan, KR;
Dong Hyun Kim, Disan, KR;
Ulsan Chemical Co., Ltd., Nam-ku, Ulsan, KR;
Abstract
The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains CFin an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.