The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
May. 02, 2006
Shinji Iino, Nirasaki, JP;
Kiyoshi Takekoshi, Nirasaki, JP;
Tadatomo Suga, Meguro-ku, Tokyo, JP;
Toshihiro Itoh, Inage-ku, Chiba-shi, Chiba-ken, JP;
Kenichi Kataoka, Tokyo, JP;
Shinji Iino, Nirasaki, JP;
Kiyoshi Takekoshi, Nirasaki, JP;
Tadatomo Suga, Meguro-ku, Tokyo, JP;
Toshihiro Itoh, Inage-ku, Chiba-shi, Chiba-ken, JP;
Kenichi Kataoka, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Other;
Abstract
Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.