The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2007
Filed:
Jul. 09, 2003
Toshio Kodama, Chiba, JP;
Masakatsu Hasuda, Chiba, JP;
Toshiaki Fuji, Chiba, JP;
Kouji Iwasaki, Chiba, JP;
Yasuhiko Sugiyama, Chiba, JP;
Yasuyuki Takagi, Chiba, JP;
Toshio Kodama, Chiba, JP;
Masakatsu Hasuda, Chiba, JP;
Toshiaki Fuji, Chiba, JP;
Kouji Iwasaki, Chiba, JP;
Yasuhiko Sugiyama, Chiba, JP;
Yasuyuki Takagi, Chiba, JP;
SII NanoTechnology Inc., , JP;
Abstract
An apparatus has a holder member () which holds a sample (), and a removing beam source () which irradiates an inert ion beam onto a cross section () of the sample () held by a holder member () and removes a fracture layer on the cross section (). Then, the removing beam source () is disposed on the holding end side of the sample () with respect to the normal L of the cross section () so that the irradiating direction of the inert ion beam is tilted at the tilt angle θ to the normal L with respect to the cross section ().