The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2007
Filed:
Feb. 06, 2004
Radek P. Chalupa, Portland, OR (US);
Harsono Siem Simka, Saratoga, CA (US);
Sadasivan Shankar, Cupertino, CA (US);
Daniel J. Zierath, Portland, OR (US);
Iouri Lantassov, Minsk, BY;
Terry T. Buckley, Dublin, IE;
Anand Durairajan, Tigard, OR (US);
Radek P. Chalupa, Portland, OR (US);
Harsono Siem Simka, Saratoga, CA (US);
Sadasivan Shankar, Cupertino, CA (US);
Daniel J. Zierath, Portland, OR (US);
Iouri Lantassov, Minsk, BY;
Terry T. Buckley, Dublin, IE;
Anand Durairajan, Tigard, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
A method for an electroplating cell which includes providing an anode chamber with at least two concentric anodes including an inner anode and an outer anode; generating a computer generated model with a simulation computer program; and selecting at least one current ratio from the computer generated model, with the computer generated model having a plurality of current ratios from which the at least one current ratio is selected and the one current ratio being a ratio of an inner electrical current to an outer electrical current. The method further includes applying the inner electrical current to the inner anode and the outer electrical current to the outer anode and adjusting the inner and outer electrical currents to incorporate the one current ratio. The generating of the computer generated model with the simulation computer program includes using a first iterative loop to determine a potential field in the anode chamber.