The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Apr. 03, 2006
Ethan M. Frye, Westfield, IN (US);
Kevin L. Griffin, Kokomo, IN (US);
Bart A. Wiles, Kokomo, IN (US);
Peter A. Hendrickson, Kokomo, IN (US);
Jennifer M. Shepler, Newark, DE (US);
Ethan M. Frye, Westfield, IN (US);
Kevin L. Griffin, Kokomo, IN (US);
Bart A. Wiles, Kokomo, IN (US);
Peter A. Hendrickson, Kokomo, IN (US);
Jennifer M. Shepler, Newark, DE (US);
Toppan Photomasks, Inc., Round Rock, TX (US);
Abstract
A system and method for automatically mounting a pellicle assembly on a photomask are disclosed. The method includes loading a photomask into a mounting apparatus and loading a pellicle assembly into a back plate of the mounting apparatus opposite the photomask. The back plate includes at least one load cell that measures a force applied by the mounting apparatus to the photomask and the pellicle assembly. The measured force associated with the at least one load cell is received and the pellicle assembly is mounted on the photomask to create a photomask assembly if the measured force is greater than or approximately equal to a minimum force.