The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Aug. 20, 2003
Toshio Kodama, Chiba, JP;
Masakatsu Hasuda, Chiba, JP;
Toshiaki Fujii, Chiba, JP;
Kouji Iwasaki, Chiba, JP;
Yasuhiko Sugiyama, Chiba, JP;
Yasuyuki Takagi, Chiba, JP;
Toshio Kodama, Chiba, JP;
Masakatsu Hasuda, Chiba, JP;
Toshiaki Fujii, Chiba, JP;
Kouji Iwasaki, Chiba, JP;
Yasuhiko Sugiyama, Chiba, JP;
Yasuyuki Takagi, Chiba, JP;
SII NanoTechnology Inc., , JP;
Abstract
There is provided a liquid metal ion beam irradiation device for irradiating a specific portion of a samplewith a prescribed liquid metal ion beam so as to form a cross section, and a gaseous ion beam irradiation devicefor scanning a prescribed region (observation region) of the cross section using a gaseous ion beam focused to a prescribed diameter and removing a damaged layer on the prescribed region.