The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Jul. 22, 2004
Applicants:
Akira Shimizu, Tama, JP;
Hideaki Fukuda, Tama, JP;
Hiroki Arai, Tama, JP;
Baiei Kawano, Tama, JP;
Takayuki Yamagishi, Tama, JP;
Inventors:
Akira Shimizu, Tama, JP;
Hideaki Fukuda, Tama, JP;
Hiroki Arai, Tama, JP;
Baiei Kawano, Tama, JP;
Takayuki Yamagishi, Tama, JP;
Assignee:
ASM Japan K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/306 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor-processing apparatus comprises a susceptor and removable placing blocks detachably placed at a periphery of the susceptor for transferring a substrate. Retractable supporting members are provided for detaching/attaching the placing blocks from/to the susceptor.