The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2007
Filed:
Jan. 04, 2005
Bernd Doerband, Aalen, DE;
Stefan Schulte, Aalen-Waldhausen, DE;
Bernd Doerband, Aalen, DE;
Stefan Schulte, Aalen-Waldhausen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A phase shifting interferometric method and apparatus comprises generating at least four different phase shifts and recording interferograms corresponding to the different phase settings and recording interferograms corresponding to the different phase settings. In the analysis of the recorded interferograms the generated phase shifts between the at least four different phase settings are determined from the measurement, i.e. from the recorded interferograms. A model simulating the interferogram intensities may be used for determining the phase shifts. The phase shifts are free adaptable parameters of the model.
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