The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
May. 18, 2005
Minori Noguchi, Mitsukaido, JP;
Masahiko Nakada, Okegawa, JP;
Takahiko Suzuki, Honjou, JP;
Taketo Ueno, Fujisawa, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunji Maeda, Yokohama, JP;
Minori Noguchi, Mitsukaido, JP;
Masahiko Nakada, Okegawa, JP;
Takahiko Suzuki, Honjou, JP;
Taketo Ueno, Fujisawa, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunji Maeda, Yokohama, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An apparatus for measuring an alignment accuracy between overlaid alignment marks formed to each of alignment mark portions on every plural chip units or exposure units arranged on a substrate to be measured includes an XY stage movable X and Y directions while mounting the substrate, an illumination system for illuminating each of the alignment mark portions, a detecting system having a lens for collecting a reflection light, a focusing system for focusing the reflection light, a scanning system for scanning a reflection light image and an image sensor receiving reflection light image for conversion into an image signal. An alignment accuracy calculator measures the alignment accuracy between the overlaid alignment marks.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile