The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Sep. 24, 2004
Applicants:
Wen-chang Shih, Taichung, TW;
Yung-chung Chang, Taipei, TW;
Min-kuei Chu, Taichung, TW;
Inventors:
Assignee:
IV Technologies Co., Ltd., Taichung, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24D 11/00 (2006.01); B24B 49/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A polishing pad having grooved window therein is provided. The polishing pad comprises a polishing layer and a window, wherein the polishing layer has at least one first groove therein and the window has at least one second groove therein. More particularly, the first groove is deeper than the second groove. The polishing pad having a grooved window therein has advantages of providing precise endpoint detection and thereby reducing or resolving defect problems.