The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Oct. 26, 2005
Asao Nakano, Kanagawa, JP;
Takao Kinefuchi, Tokyo, JP;
Hiroshi Motono, Tokyo, JP;
Atsunori Kiku, Tokyo, JP;
Asao Nakano, Kanagawa, JP;
Takao Kinefuchi, Tokyo, JP;
Hiroshi Motono, Tokyo, JP;
Atsunori Kiku, Tokyo, JP;
Rigaku Corporation, Tokyo, JP;
Abstract
An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.