The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 24, 2007

Filed:

Jan. 11, 2005
Applicants:

Scott K. Pozder, Austin, TX (US);

Kevin J. Hess, Austin, TX (US);

Pak K. Leung, Cedar Park, TX (US);

Edward O. Travis, Austin, TX (US);

Brett P. Wilkerson, Austin, TX (US);

David G. Wontor, Austin, TX (US);

Jie-hua Zhao, Austin, TX (US);

Inventors:

Scott K. Pozder, Austin, TX (US);

Kevin J. Hess, Austin, TX (US);

Pak K. Leung, Cedar Park, TX (US);

Edward O. Travis, Austin, TX (US);

Brett P. Wilkerson, Austin, TX (US);

David G. Wontor, Austin, TX (US);

Jie-Hua Zhao, Austin, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract

A technique for alleviating the problems of defects caused by stress applied to bond pads () includes, prior to actually making an integrated circuit (), adding dummy metal lines () to interconnect layers () to increase the metal density of the interconnect layers. These problems are more likely when the interlayer dielectrics () between the interconnect layers are of a low-k material. A critical area or force area () around and under each bond pad defines an area in which a defect may occur due to a contact made to that bond pad. Any interconnect layer in such a critical area that has a metal density below a certain percentage can be the cause of a defect in the interconnect layers. Any interconnect layer that has a metal density below that percentage in the critical area has dummy metal lines added to it.


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