The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
Apr. 04, 2006
David Berman, Kiryat Tivon, IL;
Isaac Mazor, Haifa, IL;
Boris Yokhin, Nazareth Illit, IL;
Amos Gvirtzman, Moshav Zippori, IL;
David Berman, Kiryat Tivon, IL;
Isaac Mazor, Haifa, IL;
Boris Yokhin, Nazareth Illit, IL;
Amos Gvirtzman, Moshav Zippori, IL;
Jordan Valley Applied Radiation, Ltd., Ha'mek, IL;
Abstract
A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.