The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2007
Filed:
Mar. 27, 2006
Byung-jin Choi, Austin, TX (US);
Ronald D. Voisin, Fremont, CA (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Michael P. C. Watts, Austin, TX (US);
Daniel A. Babbs, Austin, TX (US);
Mario J. Meissl, Austin, TX (US);
Hillman L. Bailey, Dripping Springs, TX (US);
Norman E. Schumaker, Austin, TX (US);
Byung-Jin Choi, Austin, TX (US);
Ronald D. Voisin, Fremont, CA (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Michael P. C. Watts, Austin, TX (US);
Daniel A. Babbs, Austin, TX (US);
Mario J. Meissl, Austin, TX (US);
Hillman L. Bailey, Dripping Springs, TX (US);
Norman E. Schumaker, Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Abstract
The present invention is directed to a chucking system to modulate substrates so as to properly shape and position the same with respect to a wafer upon which a pattern is to be formed with the substrate. The chucking system includes a chuck body having first and second opposed sides. A side surface extends therebetween. The first side includes first and second spaced-apart recesses defining first and second spaced-apart support regions. The first support region cinctures the second support region and the first and second recesses. The second support region cinctures the second recess, with a portion of the body in superimposition with the second recess being transparent to radiation having a predetermined wavelength. The second side and the side surface define exterior surfaces. The body includes throughways placing the first and second recesses in fluid communication with one of the exterior surfaces.