The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2007
Filed:
Sep. 11, 2002
Itsuki Kobata, Tokyo, JP;
Mitsuhiko Shirakashi, Tokyo, JP;
Masayuki Kumekawa, Tokyo, JP;
Takayuki Saito, Kanagawa, JP;
Yasushi Toma, Kanagawa, JP;
Tsukuru Suzuki, Kanagawa, JP;
Kaoru Yamada, Kanagawa, JP;
Yuji Makita, Kanagawa, JP;
Hozumi Yasuda, Tokyo, JP;
Itsuki Kobata, Tokyo, JP;
Mitsuhiko Shirakashi, Tokyo, JP;
Masayuki Kumekawa, Tokyo, JP;
Takayuki Saito, Kanagawa, JP;
Yasushi Toma, Kanagawa, JP;
Tsukuru Suzuki, Kanagawa, JP;
Kaoru Yamada, Kanagawa, JP;
Yuji Makita, Kanagawa, JP;
Hozumi Yasuda, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A substrate processing apparatus can perform an electrolytic processing, which is different from a common, conventional etching, to remove (clean off) a conductive material (film) formed on or adhering to a bevel portion, etc. of a substrate, or process a peripheral portion of a substrate through an electrochemical action. The substrate processing apparatus includes: an electrode section having a plurality of electrodes which are laminated with insulators being interposed, and having a holding portion which is to be opposed to a peripheral portion of a substrate; an ion exchanger disposed in the holding portion of the electrode section; a liquid supply section for supplying a liquid to the holding position of the electrode section; and a power source for applying a voltage to the electrodes of the electrode section so that the electrodes alternately have different polarities.