The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
Feb. 20, 2002
Toshifumi Honda, Ebina, JP;
Hirohito Okuda, Yokohama, JP;
Yasuhiko Ozawa, Abiko, JP;
Katsuhiro Kitahashi, Hitachinaka, JP;
Toshifumi Honda, Ebina, JP;
Hirohito Okuda, Yokohama, JP;
Yasuhiko Ozawa, Abiko, JP;
Katsuhiro Kitahashi, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An image picked up by a detection system capable of actualizing a three-dimensional inclination is usually poor in the signal-to-noise ratio, and it is difficult to stably detect minute defects. Images that actualize a three-dimensional inclination are picked up from opposed directions. The images are subject to subtraction and addition. The images improved in signal-to-noise ratio as compared with original images are calculated. The images calculated and improved in signal-to-noise ratio respectively of a defect portion and a reference portion are compared with each other. Regions differing in comparison results are detected as defects. As a result, minute defects can be inspected stably.