The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Oct. 28, 2004
Applicants:
Christoph Hohle, Bubenreuth, DE;
Ralph Dammel, Flemington, NJ (US);
Michael Francis Houlihan, Millington, NJ (US);
Inventors:
Christoph Hohle, Bubenreuth, DE;
Ralph Dammel, Flemington, NJ (US);
Michael Francis Houlihan, Millington, NJ (US);
Assignees:
Infineon Technologies, AG, Munich, DE;
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
A photoresist that is suitable for use in 157 nm photolithography includes a polymer based on fluorinated norbornene derivatives.