The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Dec. 26, 2001
Masud Beroz, Milpitas, CA (US);
Thomas H. Distefano, Monte Sereno, CA (US);
Matthew T. Hendrickson, San Jose, CA (US);
David Light, Los Gatos, CA (US);
John W. Smith, Palo Alto, CA (US);
Masud Beroz, Milpitas, CA (US);
Thomas H. DiStefano, Monte Sereno, CA (US);
Matthew T. Hendrickson, San Jose, CA (US);
David Light, Los Gatos, CA (US);
John W. Smith, Palo Alto, CA (US);
Tessera, Inc., San Jose, CA (US);
Abstract
A flexible sheet used in manufacture of microelectronic components is held on a frame formed from a rigid material so that the frame maintains the sheet under tension during processing and thereby stabilizes the dimensions of the sheet. The frame may be formed from a rigid, light-transmissive material such as a glass, and the bond between the frame and sheet may be made or released by light transmitted through the frame. Preferred features of the framed sheet minimize entrapment of processing liquids such as etch solutions, thereby minimizing carryover of processing solutions between steps. The frame may have contact openings which permit engagement of a metallic layer on the sheet by an electrode carrying electroplating or etching current without disturbing the main portion of the sheet where features are to be formed or treated.