The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2006
Filed:
Aug. 24, 2004
Mohamad A. Shaheen, Portland, OR (US);
Ryan Z. Lei, Hillsboro, OR (US);
Maxim B. Kelman, Mountain View, CA (US);
Mohamad A. Shaheen, Portland, OR (US);
Ryan Z. Lei, Hillsboro, OR (US);
Maxim B. Kelman, Mountain View, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
In one embodiment, a method comprises placing a first and a second substrate into a reaction chamber, the first substrate being made of an indium antimonide material and having a first surface and the second substrate being made of a silicon or a silicon dioxide material and having a second surface; exposing the first and second surfaces to an oxygen plasma; forming a bond between the first and the second substrates by placing the first surface in contact with the second surface; and annealing the first and the second substrates to strengthen the bond.