The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7145245 B1

Expired

Date of Patent:

Dec. 05, 2006

Filed:

Sep. 02, 2005

Low-k dielectric film with good mechanical strength that varies in local porosity depending on location on substrate—therein

Applicants:

Grant Kloster, Lake Oswego, OR (US);

Lee Rockford, Portland, OR (US);

Jihperng Leu, Portland, OR (US);

Inventors:

Grant Kloster, Lake Oswego, OR (US);

Lee Rockford, Portland, OR (US);

Jihperng Leu, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:

George Chen

Primary Examiner:

Hung Vu

Int. Cl.

CPC ...

H01L 23/48 (2006.01); H01L 23/58 (2006.01);

U.S. Cl.

CPC ...

Abstract

The present invention discloses a method including providing a substrate; forming a dielectric over the substrate, the dielectric having a k value of about 2.5 or lower, the dielectric having a Young's modulus of elasticity of about 15 GigaPascals or higher; forming an opening in the dielectric; and forming a conductor in the opening. The present invention further discloses a structure including a substrate; a dielectric located over the substrate, the dielectric having a k value of 2.5 or lower, the dielectric having a Young's modulus of elasticity of about 15 GigaPascals or higher; an opening located in the dielectric; and a conductor located in the opening.

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Kloster, Grant. (2006). Low-k dielectric film with good mechanical strength that varies in local porosity depending on location on substrate—therein (U.S. Patent No. 7145245). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7145245

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