The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2006
Filed:
Mar. 06, 2006
Shou-sung Chang, Stanford, CA (US);
Stan D. Tsai, Fremont, CA (US);
Donald J. K. Olgado, Palo Alto, CA (US);
Liang-yuh Chen, Foster City, CA (US);
Alain Duboust, Sunnyvale, CA (US);
Ralph M. Wadensweiler, Sunnyvale, CA (US);
Shou-Sung Chang, Stanford, CA (US);
Stan D. Tsai, Fremont, CA (US);
Donald J. K. Olgado, Palo Alto, CA (US);
Liang-Yuh Chen, Foster City, CA (US);
Alain Duboust, Sunnyvale, CA (US);
Ralph M. Wadensweiler, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an upper surface disposed above the lower layer and below the working surface of the processing layer. The upper surface of the electrode is at least partially exposed to the working surface to provide an electrolyte pathway between the upper surface of the electrode and the working surface.