The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2006
Filed:
Mar. 23, 2004
Henrikus Herman Marie Cox, Eindhoven, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Nicolaas Rudolf Kemper, Eindhoven, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Martijn Johannes Verbunt, Eindhoven, NL;
Lambertus Adrianus Van Den Wildenberg, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Nicolaas Rudolf Kemper, Eindhoven, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Martijn Johannes Verbunt, Eindhoven, NL;
Lambertus Adrianus Van Den Wildenberg, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a projection system for EUV, the positions of mirrors are measured and controlled relative to each other, rather than to a reference frame. Relative position measurements may be made by interferometers or capacitive sensors mounted on rigid extensions of the mirrors.