The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2006
Filed:
Feb. 11, 2004
Yu-sin Yang, Seoul, KR;
Sang-mun Chon, Kyunggi-do, KR;
Sun-yong Choi, Kyunggi-do, KR;
Chung-sam Jun, Kyunggi-do, KR;
Yu-Sin Yang, Seoul, KR;
Sang-Mun Chon, Kyunggi-do, KR;
Sun-Yong Choi, Kyunggi-do, KR;
Chung-Sam Jun, Kyunggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
In a method and an apparatus for inspecting defects on a substrate using a light beam, a light source irradiates light beams having different wavelengths onto the substrate. A detector detects first lights scattered from a surface of the substrate and second lights scattered from impurities on the substrate by irradiation of the light beams. An operation unit compares first intensities of the first lights with second intensities of the second lights in order to produce differential values therebetween, and selects a wavelength corresponding to a maximum value of the differential values. An inspection process for inspecting the defects on the substrate is performed using a light beam having the selected wavelength.