The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2006
Filed:
Mar. 11, 2004
Sven Antoin Johan Hol, Eindhoven, NL;
Johan Cornelis Compter, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Patricia Vreugdewater, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Johan Cornelis Compter, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Patricia Vreugdewater, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A linear motor having a high driving force, high efficiency and low normal force comprises two opposed magnet tracks and an armature comprising three open coil sets. The linear motor may be used to drive a stage, such as, for example, a mask or wafer stage, in a lithographic apparatus.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile