The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Apr. 06, 2005
Applicants:
Natsuko Nakamura, Tokyo, JP;
Joachim Zach, Heidelberg, DE;
Inventors:
Natsuko Nakamura, Tokyo, JP;
Joachim Zach, Heidelberg, DE;
Assignee:
Jeol Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/153 (2006.01); H01J 37/08 (2006.01); G21K 5/10 (2006.01); G21K 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is disclosed a method and apparatus for automatically correcting aberrations in an electron beam by the use of a computer. An axis deviation-correcting means for correcting deviation of the axis of the beam, a focusing means for correcting defocus of the beam, a chromatic aberration-correcting means for correcting chromatic aberration in the beam, and an aperture aberration-correcting means for correcting aperture aberration in the beam are stored in the computer.